Lithography. Stefan Landis
- Тип: Текст PDF
- Автор:
- Издательство: John Wiley & Sons Limited(2018)
- ISBN: 9781118621233, 978-5-04-474471-4
- Страниц: 405
- Язык: Английский
20892.39 руб.
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- Жанры: Техническая литература, Электроника
- Описание
- Фрагмент
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
