Главная / Категории / знания и навыки / учебная и научная литература / технические науки / материаловедение

Atomic Layer Deposition. Marja-Leena K??ri?inen и др.

Купить Atomic Layer Deposition
23153.29 руб. Скачать
Отложить

Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.

Рады Вам также предложить